A Users Guide to Vacuum Technology, 4th Edition, 真空技術ユーザーガイド, 第4版, 9781394174225, 978-1-394-17422-5【電子書籍 / 1ユーザー】
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Description
Vacuum technology is used to provide process environments for other kinds of engineering technology, making it an unsung cornerstone of hundreds of projects incorporating analysis, research and development, manufacturing, and more. Since it is very often a secondary technology, users primarily interested in processes incorporating it will frequently only encounter vacuum technology when purchasing or troubleshooting. There is an urgent need for a guide to vacuum technology made with these users in mind.
For decades, A User’s Guide to Vacuum Technology has met this need, with a user-focused introduction to vacuum technology as it is incorporated into semiconductor, optics, solar sell, and other engineering processes. With an emphasis on otherwise neglected subjects and on accessibility to the secondary user of vacuum technology, it balances treatment of older systems that are still in use with a survey of the latest cutting-edge technologies. The result promises to continue as the essential guide to vacuum systems.
Readers of the fourth edition of A User’s Guide to Vacuum Technology will also find:
- Expanded treatment of gauges, pumps, materials, systems, and best operating practices
- Detailed discussion of cutting-edge topics like ultraclean vacuum and contamination control
- An authorial team with decades of combined research and engineering experience
Contents:
Part I Its Basis
1 Vacuum Technology
2 Gas Properties
3 Gas Flow
4 Gas Release from Solids
Part II Measurement
5 Pressure Gauges
6 Flow Meters
7 Pumping Speed
8 Residual Gas Analyzers
9 Interpretation of RGA Data
Part III Production
10 Mechanical Pumps
11 Turbomolecular Pumps
12 Diffusion Pumps
13 Getter and Ion Pumps
14 Cryogenic Pumps
Part IV Materials
15 Materials in Vacuum
16 Joints Seals and Valves
17 Pump Fluids and Lubricants
Part V Systems
18 Rough Vacuum Pumping
19 High Vacuum Systems
20 Ultraclean Vacuum Systems
21 Controlling Contamination in Vacuum Systems
22 High Flow Systems
23 Multichambered Systems
24 Leak Detection
Part VI Appendices